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Ultrasonic fingerprint sensors based on micromachined ultrasound transducers require very fine pitch to achieve high resolution imaging. We investigate a 110×56 PMUT array based on monolithic eutectic bonding to CMOS. To achieve high fill-factor, the PMUTs are anchored through small eutectic pillars, resulting in a high degree of mutual coupling between neighboring PMUTs. As a result, the mode shape...
Temperature and package stress induced errors pose a challenging obstacle for improving accuracy of strain-based resonant pressure sensors. This paper presents a multiple sensor solution where three resonators were built under a shared pressure sensor diaphragm. By manipulating the anchoring scheme and the location of the resonators, temperature and stress signals can be independently captured and...
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