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We developed a microscanner-based optical coherence tomography probe for the 3-dimensional inspection of display panels, which will be extended to arrayed scanners to enhance inspection speed. The scanning range and beam diameter were 13.1 mm and 84.5 μm, respectively.
We present a novel method to adjust the beam tilt angle and tune the axial focus of an electrowetting on dielectric liquid microlens encapsulated by parylene film. The lens system consists of four control electrodes with two immiscible spherical liquid lenses of different refractive indexes encapsulated by a flexible polymer. To tilt the incident beam, the lateral position and curvature of the inner...
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