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This paper presents the design, fabrication and characterization of a high fill-factor micromirror array in application of wavelength selective switch (WSS). The micromirror array consists of 52 independent micromirrors. Each micromirror is composed of a cantilever-type micromirror plate (800μm×120μm) with a bumper and an eight-terraced bottom electrode with a limiting plane. A cantilever beam is...
In this paper, we propose and demonstrate a novel micro-mirror array. The Micro-mirror structure with terraced electrodes was simulated with the aid of CoventorWare and the simulation results show that the micro-mirror can obtain a required tilted angle. Si-Si bonding technology is used for fabricating the Micro-mirror array and an array with high Fill factor of 97% has been achieved.
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