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High-g accelerometers are widely used in explosion and shock measurement. This paper describes a MEMS piezoresistive high-g accelerometer whose range is more than 50000g. It is designed on the basis of silicon on insulator (SOI) solid piezoresistive chip. The chip has a structure where both ends of the beam are fixed. Through the stress analysis and mode analysis of the accelerometer, the detailed...
The current paper discusses the measure methods and presents the application of acceleration sensors in a stamping press tonnage load monitoring. The forming force is proportion to the distortion of press stressed components, and it can be calculated with double integral from the acceleration signals. Multi-sensors of MEMS are used to obtain the relative signals between the frame body and bottom die...
To satisfy the requirement of measuring high shock acceleration for hard target smart fuze, a double-end fixed beam structure of MEMS piezoresistive high g accelerometer is proposed. The designed sensor is based on the combination of Silicon on Insulator (SOI) solid piezoresistive material and Micro Electro Mechanical Systems (MEMS) technique. Based on the principle of the sensor, stress analysis...
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