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In this paper, we estimate the influences of random dopants (RDs) and interface traps (ITs) using experimentally calibrated 3D device simulation on electrical characteristics of high-κ / metal gate CMOS devices. Statistically random devices with 2D ITs between the interface of silicon and HfO2 film as well as 3D RDs inside the device channel are simulated. Fluctuations of threshold voltage and on-/off-state...
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