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The TiN, TiAlN, and TiAlSiN coatings were prepared on YT14 cutting tool surface with CAIP (cathode arc ion plating), the surface morphologies and phases were analyzed with FESEM (field emission scanning electron microscopy), and XRD (X-ray diffraction), respectively, and the coating parameters such as 3D surface micro-topography, grain size, surface height, hierarchy, profile height, and power spectral...
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