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Elastic properties of Si-B-O glass layers fabricated on (100) Si substrates by the flame hydrolysis deposition method were measured. Thicknesses of the layers were about 20 μm. The longitudinal velocity of the layers was measured by ultrasonic spectroscopy of normal incidence covering the frequency range from 100 MHz to 300 MHz. Frequency dispersion of the Rayleigh wave velocity was also measured...
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