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Pentacene organic thin-film transistors (OTFTs) with HfLaO high-κ gate dielectric were fabricated. The dielectric was prepared by a sputtering method and then annealed in N2, NH3, O2, or NO at 400 °C. The carrier mobility of the NH3-annealed OTFT could reach 0.59 cm2/V · s, which is higher than those of the other three devices. Moreover, the NH3-annealed OTFT obtained the smallest subthreshold swing...
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