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This paper describes realization and characterization of SrTiO 3 (STO) high K MIM capacitors above BiCMOS integrated circuit (IC). These capacitances are connected to IC and are used as coupling capacitors in order to realize a high pass filter. Surface capacitance achieved is 10nF/mm 2 with capacitance value of 1.2nF. The process for STO MIM fabrication does not exceed 400°C, which...
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