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In this brief, a robust control design is presented for an electrostatic microbridge actuator. For this system, a spatially distributed electrostatic force serves as control input. Moreover, a spatially distributed measurement of the bridge displacement is assumed to be available. For an accurate tracking of a reference trajectory—repeated periodically during the operation of the microbridge—an iterative...
In this paper, we consider the control of an electrostatic microbridge actuator with a distributed electrostatic force input and distributed displacement sensing. A bounded desired trajectory is achieved by using an Iterative Learning Control (ILC) method based on discrete linear repetitive processes with the use of Linear Matrix Inequalities (LMI). Space and time discretization is accomplished by...
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