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Tb3+–Yb3+ co-doped SiNx down-conversion layers compatible with silicon Photovoltaic Technology were prepared by reactive magnetron co-sputtering. Efficient sensitization of Tb3+ ions through a SiNx host matrix and cooperative energy transfer between Tb3+ and Yb3+ ions were evidenced as driving mechanisms of the down-conversion process. In this paper, the film composition and microstructure are investigated...
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