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We present a modeling approach for the efficient full system design of MEMS. Our methodology is based on a hierarchical approach, which allows the derivation of predictive system-level models. This procedure starts with high-fidelity continuous-field simulations to determine all model parameters and their dependencies on external impacts followed by a proper experimental calibration of the models...
We present hardware-in-the-loop simulations of a MEMS acceleration sensor system with view to reduce the development time and complexity especially regarding design and test of dedicated control algorithms. To this end, the physically-based high-level Simulink model of the mechanical sensor is connected to a FPGA hardware board, on which the corresponding control algorithms (in our case PID and fuzzy...
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