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In-situ X-ray diffraction (XRD) was employed to study the effect of the deliberate change of the Ti/Ni ratio during the deposition of Ni-Ti films. Thus, graded films were deposited exhibiting distinctive composition and crystalline structure along the growth direction. The as-sputtered films were ex-situ characterized by Auger electron spectroscopy (AES), cross-sectional transmission electron microscopy...
Abstract. Nanometer-sized SiC precipitates were synthesized in situ in Si by simultaneous implantation of two ion beams of C+ and Si+ ions. The results of simultaneous dual-beam implantation are compared with those of sequential dual-beam ion implantation and of single-beam C+ ion implantation. Remarkable differences are observed regarding the content and the crystal quality of SiC precipitates as...
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