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Processes leading to homogenization of chemical and phase composition of near-surface layers materials made from titanium and iron-carbon alloys under irradiation of a low-energy intense pulsed electron beam have been investigated. It has been shown that preliminary heating leads to appearance of a more homogeneous chemical composition of surface alloy. It has been determined that an electron-beam...
A silicon oxynitride layer was obtained on a polished silicon wafer surface by nitrogen plasma immersion ion implantation. Oxygen is provided by the residual gas in the implantation chamber (base pressure of 3times10-5 mbar) and is also implanted as the main impurity. As-implanted Si samples were analyzed by high-resolution Auger electron spectroscopy (AES), which indicated the formation of a SiOx...
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