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Zinc-substituted lithium tantalate thin films were fabricated for improving the electrical resistivity by compensating the valence of lattice defects in LiTaO3 crystal. The films with the chemical composition of (Li1.00-xZnx)TaO3 were fabricated on (111)Pt/TiO2/SiO2/(100)Si substrate by a chemical solution deposition technique using metal-organic precursors. Dense films consisting of a ilumenite-type...
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