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Diamond films of 5-μm thickness are irradiated with the emission of an ArF excimer laser (193 nm, τ = 20 ns, repetition rate = 20 Hz) in air, O 2 , He, H 2 , N 2 and vacuum. The sample surface is polished with the laser beam under an angle of incidence of 80°. Atomic Force Microscopic (AFM) measurements show differences of morphology and average roughness between polished films...
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