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The determination of mechanical properties of nanoscale structures is becoming increasingly important as micro-system and ultra-large-scale integrated circuit technologies continue to mature. Traditional experimental methods cannot avoid the influence on the hardness measurement from the presence of the substrate. Numerical computation method of finite-element modelling with molecular dynamics simulation...
The behaviour of micro/nanosurface adhesive contacts and adhesive characteristics are important for micro/nanomechanical design and a material's mechanical property. The objective of this Letter is to study a material's deformation and adhesion behaviour during the nanoindentation process using the numerical analysis method. The results show that nanoindentation has a great influence upon the whole...
Although people have already carried out many meaningful research about tool materials and structure, machining technique parameters, machined surface quality, there is little effort about physical essence of cutting process, micro-mechanism of structure property, hardening and destroy. In the case of computer simulation ultraprecision manufacturing technology (UMT), the materials are always assumed...
With the development of semiconductor industry, the polishing method has already became the main stream technique in realizing the global flatness. Because of lacking investigation physical essence of polishing, the prediction power and robustness of today's material removal model is poor. In order to understanding micro-mechanism underlying planarization, the author carried out computer simulation...
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