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High intensity sub-wavelength spots and low divergence nanojets are observed in a system of Si3N4 microdisks illuminated from the side with laser light of wavelengths 532 nm and 633 nm. The disks are of height 400 nm with diameters ranging from 1μm to 10 μm. Light scattered from the disk and substrate is observed by imaging from above. In free space light is focused inside the disks and a sub wavelength...
We fabricate microdisks from Silicon Nitride (Si3N4) on a silica (SiO2) substrate using a simple e-beam lithography and inductively coupled plasma (ICP) etching process. The method results in production of a large number of resonators in a quick and reproducible fashion. The Si3N4 exhibits an intrinsic broad defect emission across the visible range. We use this luminescence to probe the resonance...
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