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We developed a spectral-domain optical coherence tomography (SD-OCT) with a white light source for high-resolution, non-destructive profile imaging. By using a 625-nm-centered white light (260 nm bandwidth), 0.69 /nm of axial resolution was achieved. This resolution is suitable for the inspection of thin photoresists (e.g., 1–2 μm) coated semiconductor wafers, which are used for optical device fabrication.
We have measured microwave dielectric properties of NaxNd(2-x)/3TiO3 solid solutions (x=0.05 - 0.5) in order to investigate an effect of the compositional ordering in A-sites of perovskite structure. According to the X-ray diffraction, the A-site is disorder in the composition range of x = 0.5 - 0.2. A compositional ordering (Na+, Vacancy / Nd3+) of A-sites appeared when x < 0.2. Qldrf values found...
Lead-free KNbO3 ceramics were synthesized from alkoxy-derived powders fabricated by sol-gel process. The powders size-controlled from about 200 to 400 nm by different solvents and calcination temperatures were formed to ceramic discs by an ordinary ceramics processing, then sintered at 1020degC in K2O-rich atmosphere. Single phase KNbO3 ceramics were obtained by using a precursor solution refluxed...
With advent of ubiquitous age, the high quality dielectric materials have been required for the wireless communications available to the millimeterwave as well as microwave frequencies. These high frequencies would be expected for ultra high speed LAN, ETS and car anti-collision system on the intelligent transport system (ITS) and so on. Silicates are good candidate for microwave/millimeterwave dielectrics,...
Microwave dielectric properties of Ca0.85Nd0.1TiO3- LnAlO3(Ln = Sm, Gd, Dy, Er) ceramics have been investigated. Structural characteristics of the specimens were evaluated by Retieveld refinement of XRD patterns and HRTEM. Solid solution limits were dependent on the ionic radius of Ln3+ ion. With the decrease of ionic radius of Ln3+ ions, the thermal stability of the resonant frequency (TCF) was decreased...
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