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Dielectrophoresis (DEP) has been deemed as a potential and ideal solution for bioparticle manipulation. A 3‐D carbon micro‐electro‐mechanical system (MEMS) fabricated from the latest developed carbon‐MEMS approach has advantages of offering low‐cost, biocompatible and high‐throughput DEP manipulation for bioparticles. In this paper, a typical process for fabrication of various 3‐D microelectrode configurations...
Stroboscopic interferometer system is a kind of excellent measurement system for MEMS characterization which can measure the motion of whole MEMS structure in the vision filed, and the dynamic properties such as eigenfrequency and vibration modal shape can be obtained. This paper presents a data analysis method for MEMS dynamic characterization based on stroboscopic interferometer system, which establishes...
Testing of microstructure dynamics is necessary to develop reliable and marketable microelectromechanical systems (MEMS) products. A measurement system for three-dimensional motions and dynamics characterization of MEMS is presented in this paper. The system integrates phase shifting interferometry, microvision, stroboscopic illumination, and base excitation, thus is able to measure the surface shapes...
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