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UHF vibrating micromechanical ring resonators with solid-filled dielectric transducer gaps (as opposed to previous air gaps) operating in a compound-(2,4) mode have been demonstrated at 979.6 MHz with Q's on the order of 3,100 and motional resistances effectively 4.7?? smaller than air gap counterparts under identical bias conditions. Due to their higher dielectric constant, substitution of solid...
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