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In current research realm, polydimethylsiloxane (PDMS)-based nanofluidic devices are widely used in medical, chemical, and biological applications. In the present paper, a novel nanomilling technique (consisting of an AFM system and a piezoelectric actuator) was proposed to fabricate nanochannels (with controllable sizes) on PDMS chips, and nanochannel size was controlled by the driving voltage and...
In the present study, nanochannels are fabricated on a poly (methyl methacrylate) (PMMA) surface using an atomic force microscopy (AFM) tip-based nanomilling method. Experiments are conducted using a silicon tip with a radius around 30 nm. The influence of three typical feeding directions of the relative rotational motion between the tip and the sample on the machined results is studied in detail...
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