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This paper presents a reliable nanolithography technique, namely dynamic plowing lithography (DPL) based on a commercial atomic force microscope (AFM). The poly(methyl methacrylate) (PMMA) solution spinning on a silicon substrate is utilized to be scratched directly with an oscillating tip at its resonance frequency. The films with different thickness are obtained by adjusting the concentration of...
Due to the tip‐sample interaction which is the measurement principle of Atomic Force Microscope (AFM), tip wear constantly occurs during scanning. The blunt tip caused by the wear process makes more tip geometry information involved in the image, and correspondingly it increases the measurement error. In the present study, the scan parameters of AFM in tapping mode which affect the wear of single...
Nanobundles patterns can be formed on the surface of most thermoplastic polymers when the atomic force microscope (AFM)‐based nanomechanical machining method is employed to scratch their surfaces. Such patterns are reviewed as three‐dimensional sine‐wave structures. In the present study, the single‐line scratch test is used firstly to study different removal states of the polystyrene (PS) polymer...
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