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Rare earth (RE) elements are important for the optical tuning of wide bandgap oxides (WBO) such as β-Ga2O3 or ZnO, because β-Ga2O3:RE or ZnO:RE show narrow emission lines in the visible, ultra-violet and infra-red region. Ion implantation is an attractive method to introduce dopant into the crystal lattice with an extraordinary control of the dopant ion composition and location, but it creates the...
Optical properties of thin (≈100 nm) ZnO films in comparison with thick (≈1 μm) layers deposited on sapphire substrates by atomic layer deposition (ALD) at temperatures from 100 to 300 °C are investigated by optical transmittance and luminescence. It is found that growth temperature, the thickness of the layers, and post‐grown annealing influence the measured optical bandgap values and low‐temperature...