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Thermal stability of sputter deposited ZnO thin films was evaluated by thermal desorption spectroscopy (TDS). Desorption of Zn was mainly observed from the films deposited at low O 2 /Ar gas ratio and low RF power. In contrast, O 2 desorption was mainly observed from the films deposited at high O 2 /Ar gas ratio and high RF power. The amount of desorbed O 2 from the...
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