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Piezoelectric AlN thin film has been considered for fabricating the thin film bulk acoustic wave resonator (FBAR) for over years. Characterization of thin film material properties including density, elastic modulus, and piezoelectric coefficient are essential in processing study and for predicting the performance of the acoustic wave devices. In this paper, the authors present our results on the fabrication...
Quartz thickness shear mode (TSM) resonators for monitoring the attachment and spreading of mammalian cells have been investigated in the past years. Recent studies have shown that the TSM resonator signal is not only contributed by cellular body closed to the resonator substrate, but also contributed by the extracellular matrix (ECM), which is a protein layer between the cellular body and the resonator...
Presented in this paper is the study of the performance evaluation of a valveless micropump driven by a ring-type piezoelectric actuator. The application of this micropump is to circulate fuel inside a miniaturized direct methanol fuel cell (DMFC) power system. A theoretical model based on the theory of plates and shells is established to estimate the deflection and the volume change of this micropump...
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