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A method to determine key control-factors for low temperature synthesis of Graphene using Plasma-Enhanced CVD is demonstrated in this work. Fractional-Factorial experiments are performed in order to accurately determine the control-factors while keeping the number of experimental runs to minimum. Temperature, RF power and deposition time are found to be the important controlling factors on the basis...
A statistical method to determine key control-factors for synthesis of Graphene on Copper (Cu) using amorphous carbon (a-C) as the solid carbon source is demonstrated in this work. Attribute-Response Factorial Design-of-Experiments (DoE) are analyzed in order to accurately determine the key control-factors. Temperature and a-C thickness are found to be the important controlling factors. The outcome...
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