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This paper presents a novel MEMS-based integrated current and voltage sensor for the measurement of voltage and current in power distribution networks. It adopts three-dimensional (3D) induction coil as current sensor and two asymmetric sensing electrodes as voltage sensor to detect voltage and current simultaneously. A micromachining fabrication process is proposed to fabricate the integrated current...
This paper proposes an electric field microsensor with metal-silicon structure. For the first time, metal materials are used as a mask layer in the fabrication process as well as a structure layer and bonding pads of this electric field microsensor. With less masks used, this fabrication process is simpler than the common process. Moreover, the metal materials can protect the top edge of the structure...
This work mainly describes an electrochemical microsensor based on the reduction of molybdophosphate complex for fast determination of total phosphorus (TP) in water. Compared with the traditional methods for phosphate detection reported previously that used bulk electrodes, this microsensor responds faster, and can be applied to TP detection rather than merely phosphate. Calibration of phosphate...
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