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In this paper, a novel approach for the determination of densities and viscosities of fluids, using a multi-mode MEMS resonator, is introduced. A self-actuating/self-sensing piezoelectric MEMS-resonator is design in operated in a distinct way, so that lateral as well as transversal bending modes can be excited within one measurement cycle. This enables a unique evaluation principle based on a two-step...
The resonant characteristics of a mechanical resonator immersed in liquid provide valuable parameters for density and viscosity sensing. In particular, the combination of microresonators with electronic circuits, for tracking their natural frequency and quality factor, has great interest as low cost and size solution. In this work, we focus on an oscillator featuring an in-liquid piezoelectric microplate...
There are many examples of physical sensing in liquid employing resonators, especially involving TSM quartz crystals. Nevertheless, to determine density and viscosity independently, out-of-plane vibration modes are required, what typically results in low quality factors. Non-fundamental out-of-plane vibration modes have not been deeply studied for this application. Here we demonstrate the benefit...
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