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The use of Polydimethylsiloxane (PDMS), an ultra flexible elastomer, as a substrate for microwave devices in the 60 GHz band is reported. Bulk PDMS is demonstrated to be lossy at millimeter waves, that is why membrane-supported devices are considered. A reliable and robust technological process has been developped to micromachine membrane-supported transmission lines and microstrip antennas. A microstrip...
This paper describes an improved technological process with improved reliability, compatible with the microfabrication of larger patch antenna arrays and very clean with respect to biocompatibility issues. This paper is organized as follows: A study of insertion losses of PDMS transmission lines (TL) is first presented. Then a 4times2 elements patch antenna array printed on a 20-mum thick PDMS membrane...
The use of polydimethylsiloxane (PDMS), an ultra flexible polymer, as a substrate for the realization of reconfigurable microwave devices in the 60-GHz band is presented. As bulk PDMS is demonstrated to be lossy at millimeter waves, membrane-supported devices are considered. A new reliable and robust technological process has been developed to micromachine membrane-supported transmission lines and...
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