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In this work, we present a complete multiphysics modelling (via the Finite Element Method, FEM) of an air coupled piezoelectric micromachined ultrasonic transducer (PMUT) with preliminary experimental validations. The PMUT is a suspended layered membrane, in which one of the layers is made of piezoelectric material. By means of an applied voltage over the piezoelectric layer thickness, the device...
This paper presents a Micro Electro-Mechanical System (MEMS) that performs electrostatic force actuation and capacitive microdisplacement sensing in the same chip. By driving the actuator with a given voltage, a known force can be applied to a microsample under test by using a silicon probe tip, while the obtained displacement is measured. This allows to extract the mechanical properties of the microsample...
This paper deals with the problem of accurate evaluation of global quantities related to the electrostatic fields in micro-electro-mechanical systems (MEMS). In particular, the capacitance and the electrostatic force play often an important role in the design of micro-machines. In spite of the fact that some simplified formulas have been proposed so far, in many cases it is necessary to improve the...
Spontaneous adhesion can seriously jeopardize the reliability of micro-electro-mechanical systems, both during the fabrication phase and in the operation conditions. For this reason, adhesion in MEMS has been the topic of abundant research works in the last decade. This paper aims at the formulation of a computational model in order to simulate the adhesion phenomena in various environmental conditions...
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