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In this study, the increase mechanism of the indium-tin-oxide (ITO) work function (φw) by KrF excimer laser irradiation was investigated. From the observed x-ray photoelectron spectroscopy (XPS) results and four-point probe measurements, it is suggested that the surface chemical changes and the laser irradiation time had strong effects on the φw of ITO. Incorporation of oxygen atoms near the ITO surface...
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