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This paper presents a working silicon-based MEMS electrostatic transducer for harvesting and converting the energy of vibrations into electrical energy. The transducer is fabricated in a batch silicon-on-glass process. Two designs, for 1D and 2D vibrations, are addressed. The 1D harvester demonstrates between 60 and 100 nW of mechanical-to-electrical power conversion at 250 Hz when implemented in...
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