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We propose a new design of the electrostatically actuated deformable mirror with low voltage operation for adaptive optics especially for scanning laser ophthalmoscopy. By using torsional actuation and allowing the arrayed bottom fixed electrodes moving along vertical direction, the gaps between mirrors and the bottom electrodes keep small so that the electrostatic force is large enough to deform...
Reported presently are two designs to improve the performance of a “chevron” electro-thermal in-plane actuator. One incorporates beams with uniform cross-sections but nonuniform lengths and tilt angles to accommodate the thermally induced expansion of the “shuttle”; the other incorporates beams with non-uniform cross-sections to achieve a wider spread of the high temperature “expansion” regions of...
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