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This paper presents a high-power energy-harvesting device based on a three-ports electrostatic comb-drive mechanism. A symmetric electrodes structure is used to reduce the binding electrostatic force, thereby allowing large displacement of the oscillator mass at a low acceleration. With an acceleration of 0.27 G at 125 Hz, output power of 150.3 μW was obtained, where mechanical stroke of over 209...
We propose a high power-output vibrational energy harvesting based on ionic liquid. Ionic liquid enables very large capacitance (1.0–10 µF cm−2) on the electrode at bias voltage less than 1.9 V due to its extremely thin (∼ 1 nm) electrical double layer. By mechanical squeezing and drawing the ionic liquid, that was solidified with a polymer additive, between a pair of electrodes at 15 Hz, we stably...
We developed a new type of a microcantilever biosensor resonating at the interface between air and liquid. The cantilever sensor has advantages in high signal-to-noise ratio (SNR) and high quality factor (Q-factor) for detecting bio-reactions because liquid damping acts on only one-side, and because there is no obstacle between detection, excitation lasers and the cantilever. (Fig. 1 (c)) Using the...
This publication deals with a resonant RF-based biosensor for in-liquid operation. Stop-band filter modeling and characterizations are investigated in order to discriminate dead and alive suspensions of human cultured cells. This proof of concept demonstrator features noticeable contrasts on both resonant frequency (7%) and amplitude (2.1 dB). Theses results consequently demonstrate that RF detection...
We report a CMOS-compatible low-temperature process for electrostatic MEMS scanner with highly reflective photonic crystal mirror in the near IR region. The photonic crystal was made in the EB-evaporated amorphous silicon layer deposited on the MEMS scanner. The reflectivity was found over 90 % at 1.55 mum wavelength. Mechanical angle displacement of 6 degree was obtained with an applied voltage of...
This study presents a method for monitoring kinetics of biological interaction using photothermally-actuated microcantilevers resonating in liquid. The surface of the cantilever was functionalized with anti-insulin-antibody to monitor insulin. By varying the insulin concentration, different reaction kinetics were observed in real time by monitoring the resonance frequency shift (Deltafr) of the MEMS...
We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.
This paper reports a design and fabrication technique of high-power handling MEMS (micro electro mechanical systems) optical scanner for laser 3D image display application. The MEMS scanner is designed to control the reflection of high-power YAG-laser beam of 5 W (0.5 mW/pulse) by the optomechanical combination of a dielectric-film coated mirror cube and an electrostatic MEMS scanner platform.
We describe a MEMS-based method for the biomechanical characterization of filamentary molecules. The system consists of a pair of electrostatically actuated silicon nanotweezers and a differential capacitive sensor that is connected to the moving tip of the tweezers. With such a tool, we achieved sub-nanometer displacement resolution (around 0.2 nm), detected the trapping of DNA nanowires and measured...
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