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We developed a new type of a microcantilever biosensor resonating at the interface between air and liquid. The cantilever sensor has advantages in high signal-to-noise ratio (SNR) and high quality factor (Q-factor) for detecting bio-reactions because liquid damping acts on only one-side, and because there is no obstacle between detection, excitation lasers and the cantilever. (Fig. 1 (c)) Using the...
We report a CMOS-compatible low-temperature process for electrostatic MEMS scanner with highly reflective photonic crystal mirror in the near IR region. The photonic crystal was made in the EB-evaporated amorphous silicon layer deposited on the MEMS scanner. The reflectivity was found over 90 % at 1.55 mum wavelength. Mechanical angle displacement of 6 degree was obtained with an applied voltage of...
We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.
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