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This paper presents a monolithic integration technique of MEMS grating light valves with high-voltage (40 V) driver circuits that target for image projection display devices. Driver circuits were prepared on an 8-mum-thick SOI (Silicon-on- Insulator) wafer by the DMO S (Double-diffused Metal Oxide Semiconductor) processes, after which the MEMS grating were integrated in the identical SOI layer by...
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