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This paper proposes a novel structure of microelectromechanical-systems-based 1-D spatial light phase modulator (SLPM) that consists of a micromirror array on a silicon-on-insulator (SOI) wafer and indium tin oxide (ITO) electrodes on a glass plate. Each micromirror can exhibit bidirectional single-axis tilt, as well as up-and-down piston motions by combining the applied voltage on two ITO electrodes...
We have proposed a novel structure of one dimensional spatial light phase modulator (SLPM) that consists of a micromirror array on an SOI wafer and ITO (Indium Tin Oxide) electrodes on a glass plate. Each micromirror can exhibit bidirectional single-axis rotation, as well as up- and down- translation motion. We have fabricated the device, and confirmed its motion experimentally.
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