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We report a CMOS-compatible low-temperature process for electrostatic MEMS scanner with highly reflective photonic crystal mirror in the near IR region. The photonic crystal was made in the EB-evaporated amorphous silicon layer deposited on the MEMS scanner. The reflectivity was found over 90 % at 1.55 mum wavelength. Mechanical angle displacement of 6 degree was obtained with an applied voltage of...
We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.
This paper reports a design and fabrication technique of high-power handling MEMS (micro electro mechanical systems) optical scanner for laser 3D image display application. The MEMS scanner is designed to control the reflection of high-power YAG-laser beam of 5 W (0.5 mW/pulse) by the optomechanical combination of a dielectric-film coated mirror cube and an electrostatic MEMS scanner platform.
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