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This paper reports a tiny-sized (140μm×140μm) p-Si/Al infrared (IR) thermopile, which is low-cost bulk-micromachined only from the front-side of (111) wafer for IC-foundry compatible manufacturing. With the novel single-side bulk-micromachined structure, the tiny-size MEMS thermopile consists of six single-crystalline (SC) Si/Al thermocouples that show significantly higher Seebeck-coefficient and...
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