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An ultra-sensitive, encapsulated, resonating strain gauge first presented in Transducers'09 was calibrated and used to study stress relaxation of sputtered 99.95% Platinum (Pt) thin films at temperatures of less than 100??C. Because of the extreme long-term stability of these encapsulated crystalline resonators and the ability to observe frequency changes at or below 1 ppm, this device offers a unique...
We report on the first study of fatigue in single crystal silicon MEMS resonators within an extremely clean and controlled environment using the `epi-seal' encapsulation technology. This packaging technology provides a unique opportunity to investigate controversial issues in silicon fatigue since the devices are not exposed to air, oxygen, organics, or other residues that might complicate the initiation...
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