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Genetic Algorithm (GA) is an optimization procedure which can be applied to the identification of the nonlinear structure of a dynamic model by using experimental data. In this paper, the GA is introduced to identify the precision stage with the nonlinear friction. By means of the GA approach with a nonlinear polynomial model, the structure as well as its coefficients can be modeled accurately, and...
Digital control of a general-purpose switching power supply is one of the key technologies to perform the high reliability and the intelligent function demanded for the next generation. The contribution of this paper is the development of a digital control-based switching power supply with the ability to overcome future's requirements such as fault detection, life-time estimation and self recovery...
This paper presents a model-based ultra-precision stage control that utilizes a contact-type non-resonant ultrasonic actuator. The linear actuator is the synchronous piezoelectric device driver (SPIDER), which has the strong non-linearity due to the friction drive mechanism. Therefore, the friction characteristics are at first experimentally evaluated. Next, focusing on the non-linear property of...
In the manufacturing industry especially in the semiconductor, the requirement for high-speed, fast-response and high-precision performances is critical. In this paper, the model predictive control is introduced to the positioning control of ultra-precision stage driven by a linear actuator. The linear actuator is the non-resonant ultra-sonic motor (SPIDER) which has the strong non-linearity due to...
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