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Genetic Algorithm (GA) is an optimization procedure which can be applied to the identification of the nonlinear structure of a dynamic model by using experimental data. In this paper, the GA is introduced to identify the precision stage with the nonlinear friction. By means of the GA approach with a nonlinear polynomial model, the structure as well as its coefficients can be modeled accurately, and...
In high-speed and high-precision control of a precision stage for semiconductor manufacturing, vibration of the axially moving factors leads to operational problems and limits their utility in many applications. Reaction force and vibration controls are a key to improve the control performance. In the present paper, aiming at a systematic design of the both control systems, the 6-degree of freedom...
This paper presents a friction model-based ultra-precision stage control that utilizes the contact-type non-resonant ultrasonic motor. At first, the friction characteristic is experimentally evaluated as a function of the stage position. Next, focusing on the non-linear property of the static friction, the model-based control system is constructed. The authors also consider the time variation of the...
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