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A nanofibrous hydrogel actuator that generates bending and stretching motion in response to pH was achieved. The gel was composed of electrospun nanofiber synthesized by copolymerizing pH responsive acrylic acid and hydrophobic butyl methacrylate. In order to control the motion of the gel actuator, we introduced an anisotropic structure into the gel by controlling the flow rate of electrospining....
In our previous studies, we succeeded in construction self-oscillating gel actuator such as a self-walking gel and a dynamic motion of a gel actuator. However, the speed of the swelling-deswelling self-oscillation is too slow in order to realize practical chemical robot. In this study, we succeeded in the wide-range control of the period for the swelling-deswelling self-oscillation of a novel polymer...
In our previous study, we first succeeded in construction of a novel-types self-oscillting molecular robot. However, the driving environment of the molecular robot was firmly restricted in strong acid conditions. This is because the molecular robots drive induced by the Belousov-Zhabotinsky (BZ) reaction, which is well known for exhibiting temporal and spatiotemporal oscillating phenomena. The overall...
In this proceeding, we introduce peristaltic gel actuators as a chemical robot. The polymer gels prepared here have a cyclic reaction network like metabolic process in itself. With a cyclic reaction, the polymer gel swells-shrinks autonomously. The periodic self-oscillating motion of the gel is produced by the dissipating chemical energy of the oscillatory Belouzov-Zhabotinsky (BZ) reaction. We have...
This paper presents a model-based ultra-precision stage control that utilizes a contact-type non-resonant ultrasonic actuator. The linear actuator is the synchronous piezoelectric device driver (SPIDER), which has the strong non-linearity due to the friction drive mechanism. Therefore, the friction characteristics are at first experimentally evaluated. Next, focusing on the non-linear property of...
In high-speed and high-precision control of a precision stage for semiconductor manufacturing, vibration of the axially moving factors leads to operational problems and limits their utility in many applications. Reaction force and vibration controls are a key to improve the control performance. Aiming at a systematic design of the both control systems, at first, the 6-degree of freedom equipment is...
In the manufacturing industry especially in the semiconductor, the requirement for high-speed, fast-response and high-precision performances is critical. In this paper, the model predictive control is introduced to the positioning control of ultra-precision stage driven by a linear actuator. The linear actuator is the non-resonant ultra-sonic motor (SPIDER) which has the strong non-linearity due to...
The electrical and mechanical characteristics of a voice coil linear motor under moving conditions are evaluated using a method based on the levitation mass method (LMM). The force generated by the actuator is measured as the inertial force of the mass, which is levitated with sufficiently small friction using a pneumatic linear bearing. The moving mass of the bearing is connected to the moving part...
In recent years, a high-precision stage control has received great attention due to the progress of nano-technology. A fast-response and high-precision control method based on the internal model control in the case where the controlled object has the integral characteristic is reported. The disturbance observer-based internal model control (DIMC) system has the advantages of no-overshoot, easy-design...
In recent years, a high-precision stage has received great attention due to the progress of nano-technology. This paper presents a fast-response and high-precision control method based on the internal model control in the case where the controlled object has the integral characteristic. Firstly, we refer the problems when the internal model control (IMC) is applied to the integral plant. Next, in...
This paper introduces and describes a novel chemical robotic actuator which is driven by the Belousov-Zhanbotinsky (BZ) reaction. It is known that the BZ reaction generates the redox oscillation, and when it occurs inside a thermo-sensitive polymer gel, a spontaneous mechanical oscillation is generated (Self-oscillating gel). Our research aim is to construct a chemo-mechanical actuator using the self-oscillating...
The goal of our research is to develop a chemical robot, which unlike the conventional robots with electrical power source, is powered by a chemical reaction similar to living organism. The first step in our research is to design a chemomechanical actuator using a self-oscillating polymer gel, which undergoes periodical swelling-deswelling process. The swelling-deswelling process generates periodical...
The paper deals with vibration suppression control of flexible structures applying a fuzzy controller. Due to the complexity of the mathematical model related to the flexible structures, due to the restriction imposed by the actuator (force stroke limitation) as well as economical aspects, a fuzzy logic based approach of the control system is proposed. The experimental results using a fuzzy controller...
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