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We describe an ultra-low-power volatile compounds microsensor array towards increased selectivity and sensitivity. The chemiresistive transducers are 100 nm-thick interdigitated gold microelectrodes coated with polypyrrole-based polymer. Two sensors arrays were implemented with respectively 3 × 3 and 2 × 2 pixels2, showing a surface per pixel down to 400 × 200 μm2. The fabrication is fully CMOS-compatible...
In this paper, several physical phenomena that are usually not taken into account in MEMS simulations are considered for the simulation of a MEMS xylophone bar magnetometer. These phenomena are the temperature dependency of the material properties, the strong coupling between various fields of physics (thermal, electric and mechanical) and the stress produced by the change of temperature inside the...
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