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In this work we present a MEMS-based eNVM concept, designed for sustaining harsh environmental conditions. The endurance and the data retention features are investigated through a set of electrical characterization measurements. A guideline on the physical principles on which the memory relies is also included.
In this paper we report data on the reliability and performance characterization of a CMOS-based non-volatile memory (NVM) array, the operating principle of which is based on stiction forces within a MEMS switch. Unlike any other NVM technology, the data retention of this technology improves with increasing temperatures. The switches have been proven to operate over an extremely wide temperature range...
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