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The parameters of an electron-cyclotron resonance (ECR) C 4 F 8 /Ar gas plasma were measured using both a heated Langmuir probe and an 8-mm microwave interferometer. An attempt to estimate the negative ion density was made with three methods in the case where C 4 F 8 and Ar gas mixture rate was less than 25%; the first method is based on the analysis of the probe characteristics,...
The parameters of an electron cyclotron resonance (ECR) C 4 F 8 /Ar plasma were measured as a function of gas mixture rate and incident microwave power at different radial positions using both a heated Langmuir probe and a microwave interferometer. As the ratio of C 4 F 8 gas to argon gas was increased, the electron density measured with the microwave interferometer...
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