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We have studied the initial stage of formation of carbon nanotube layers in surface decomposition of SiC substrate by means of spectroscopic ellipsometry. Before heating, the surface of the SiC substrate was covered with an SiO 2 layer that had been formed by natural oxidation. By heating up to 1100 o C, reduction of SiO 2 layer occurs. Between 1150 and 1300 o C, the...
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