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Vacuum arc deposition of a cathodes method (Cathodic Arc Vapor Deposition) was used for deposition of multilayered coatings, based on TiN/ZrN systems, with different thickness of bilayers. Total thickness of the coatings was 11–19 μm, thickness of bilayers varied from 39 to 305 nm for different samples depending on deposition conditions. Such methods as X-Rays diffraction (XRD), Rutherford Backscattering...
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