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For some wafer fabrication processes in cluster tools, e.g., atomic layer deposition (ALD), wafer revisiting is required. Typically, in such processes, wafers need to visit two consecutive processing steps several times. Such a revisiting process can be denoted as (mi, mi + 1)h, where i means the ith-step and mi and mi + 1 mean the corresponding quantity of the processing modules in i and (i+1)th...
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